Keyword

microlithography

Description: A semiconductor fabrication technique for transferring microscopic patterns onto a substrate, typically using radiation-sensitive materials and etching.

Primary topic: Advancements in Photolithography Techniques (51%)

Wikidata ID: wiki/Q109875360

OpenAlex ID: keywords/microlithography

A review of polymer dissolution

2003 · Beth A. Miller-Chou, Jack L. Koenig · Progress in Polymer Science · 1,118

Polymer synthesis and processing using supercritical carbon dioxide

2000 · Andrew I. Cooper · Journal of Materials Chemistry · 922

Introduction to microlithography

1994 · L. F. Thompson, C. Grant Willson, et al. · International Linear Collider · 520

Polymer Data Handbook

2009 · 479

DNA electrophoresis in microlithographic arrays

1992 · W. D. Volkmuth, R. H. Austin · Nature · 448

Chemical Amplification Resists for Microlithography

2005 · Hiroshi Ito · Advances in polymer science · 431

A broadband achromatic metalens array for integral imaging in the visible

2019 · Zhi-Bin Fan, Hao-Yang Qiu, et al. · Light Science & Applications · 367

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Orthogonal Self-Assembled Monolayers: Alkanethiols on Gold and Alkane Carboxylic Acids on Alumina

1989 · Paul E. Laibinis, James J. Hickman, et al. · Science · 337

Bioanalysis in microfluidic devices

2002 · Julia Khandurina, András Guttman · Journal of Chromatography A · 302

Surface-enhanced raman scattering from microlithographic silver particle surfaces

1981 · P.F. Liao, J.G. Bergman, et al. · Chemical Physics Letters · 255

Evolution in Lithography Techniques: Microlithography to Nanolithography

2022 · Ekta Sharma, Reena Rathi, et al. · Nanomaterials · 253

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Improved spatial resolution and surface roughness in photopolymerization-based laser nanowriting

2005 · Kenji Takada, Hong-Bo Sun, et al. · Applied Physics Letters · 233

Microfabricated devices in biotechnology and biochemical processing

2002 · Tibor Chován, András Guttman · Trends in biotechnology · 229

Surface second-harmonic generation from metal island films and microlithographic structures

1981 · A. Wokaun, J. G. Bergman, et al. · Physical review. B, Condensed matter · 224

Microcontact printing of self-assembled monolayers: applications in microfabrication

1996 · James L Wilbur, Amit Kumar, et al. · Nanotechnology · 223

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Polymers for electronic and photonic applications

1993 · Chunyu Wong · 218

Extending Microcontact Printing as a Microlithographic Technique

1997 · Younan Xia, George M. Whitesides · Langmuir · 216

Chemical amplification mechanisms for microlithography

1991 · E. Reichmanis, F. M. Houlihan, et al. · Chemistry of Materials · 210

Generating Switchable and Reconfigurable Optical Vortices via Photopatterning of Liquid Crystals

2013 · Bing‐yan Wei, Wei Hu, et al. · Advanced Materials · 208

Introduction to Microlithography

1983 · L. F. Thompson1, C. G. Willson2, et al. · ACS symposium series · 201

Extreme ultraviolet lithography

1999 · R.H. Stulen, D.W. Sweeney · IEEE Journal of Quantum Electronics · 196

Prediction of polymer dissolution in swellable controlled-release systems

1987 · Ping I. Lee, Nikolaos A. Peppas · Journal of Controlled Release · 192

Spin-coated amorphous chalcogenide films

1982 · G. C. Chern, I. Lauks · Journal of Applied Physics · 167

Polymer materials for microlithography

1989 · Elsa Reichmanis, Larry F. Thompson · Chemical Reviews · 164

An ultraprecision stage for alignment of wafers in advanced microlithography

1997 · Chang-Woo Lee, Seung-Woo Kim · Precision Engineering · 160

Works count: 1,877

Citation count: 23,080