Keyword

pattern transfer

Description: A microfabrication process that reproduces a designed surface pattern on a material, including through lithography and imprinting.

Primary topic: Advancements in Photolithography Techniques (34%)

OpenAlex ID: keywords/pattern-transfer

Electron beam lithography: resolution limits and applications

2000 · C. Vieu, F. Carcenac, et al. · Applied Surface Science · 1,147

Nanofabrication by electron beam lithography and its applications: A review

2015 · Yifang Chen · Microelectronic Engineering · 865

Nanoimprint lithography: An old story in modern times? A review

2008 · Helmut Schift · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 726

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Improved Pattern Transfer in Soft Lithography Using Composite Stamps

2002 · Teri W. Odom, J. Christopher Love, et al. · Langmuir · 710

Mold-assisted nanolithography: A process for reliable pattern replication

1996 · Jan Haisma, Martin Verheijen, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 660

Orientation-Controlled Self-Assembled Nanolithography Using a Polystyrene−Polydimethylsiloxane Block Copolymer

2007 · Yeon Sik Jung, C. A. Ross · Nano Letters · 449

Crosslinked hyaluronic acid hydrogels: a strategy to functionalize and pattern

2004 · Tatiana Segura, Brian C Anderson, et al. · Biomaterials · 374

Fabrication of Si nanostructures with an atomic force microscope

1994 · E. S. Snow, P. M. Campbell · Applied Physics Letters · 369

Using Atom Transfer Radical Polymerization To Amplify Monolayers of Initiators Patterned by Microcontact Printing into Polymer Brushes for Pattern Transfer

2000 · Rahul R. Shah, David Merreceyes, et al. · Macromolecules · 358

Roller nanoimprint lithography

1998 · Hua Tan, Andrew Gilbertson, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 318

Self-ordered pore structure of anodized aluminum on silicon and pattern transfer

2000 · D. Crouse, Yu-Hwa Lo, et al. · Applied Physics Letters · 310

Nanofabrication: Conventional and nonconventional methods

2001 · Yong Chen, Anne Pépin · Electrophoresis · 302

Ion Beam Lithography and Nanofabrication: a Review

2005 · F. WATT, A. A. BETTIOL, et al. · International Journal of Nanoscience · 296

Atomic Layer Etching at the Tipping Point: An Overview

2015 · G. S. Oehrlein, D. Metzler, et al. · ECS Journal of Solid State Science and Technology · 295

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High‐Resolution Soft Lithography: Enabling Materials for Nanotechnologies

2004 · Jason P. Rolland, Erik C. Hagberg, et al. · Angewandte Chemie International Edition · 293

A Path to Ultranarrow Patterns Using Self-Assembled Lithography

2010 · Yeon Sik Jung, J. B. Chang, et al. · Nano Letters · 230

Anodized Aluminum Oxide-Assisted Low-Cost Flexible Capacitive Pressure Sensors Based on Double-Sided Nanopillars by a Facile Fabrication Method

2019 · Yunjian Guo, Song Gao, et al. · ACS Applied Materials & Interfaces · 219

Directed Assembly of Lamellae‐ Forming Block Copolymers by Using Chemically and Topographically Patterned Substrates

2007 · S.‐M. Park, M. P. Stoykovich, et al. · Advanced Materials · 216

Pattern transfer: Self-assembled monolayers as ultrathin resists

1996 · Younan Xia, Xiao-Mei Zhao, et al. · Microelectronic Engineering · 204

Phase Diagram, Design of Monolayer Binary Colloidal Crystals, and Their Fabrication Based on Ethanol-Assisted Self-Assembly at the Air/Water Interface

2012 · Zhengfei Dai, Yue Li, et al. · ACS Nano · 203

Critical tasks in high aspect ratio silicon dry etching for microelectromechanical systems

2003 · Ivo W. Rangelow · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 200

Sub-10-nm patterning via directed self-assembly of block copolymer films with a vapour-phase deposited topcoat

2017 · Hyo Seon Suh, Do Han Kim, et al. · Nature Nanotechnology · 198

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Wet‐Style Superhydrophobic Antifogging Coatings for Optical Sensors

2020 · Jongsun Yoon, Min Ryu, et al. · Advanced Materials · 190

Advanced colloidal lithography: From patterning to applications

2018 · Yandong Wang, Mengyuan Zhang, et al. · Nano Today · 179

Nanoscale patterning using self-assembled polymers for semiconductor applications

2001 · K. W. Guarini, C. T. Black, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 175

Works count: 2,232

Citation count: 36,270