Keyword

planarization

Description: Planarization is a semiconductor fabrication process that smooths and levels surface topography between layers in integrated circuits.

Primary topic: Advanced Surface Polishing Techniques (22%)

OpenAlex ID: keywords/planarization

Three-dimensional photonic metamaterials at optical frequencies

2007 · Na Liu, Hongcang Guo, et al. · Nature Materials · 921

SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography

2007 · A del Campo, C Greiner · Journal of Micromechanics and Microengineering · 826

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Bottom-up approach for carbon nanotube interconnects

2003 · Jun Li, Qi Ye, et al. · Applied Physics Letters · 518

Excited-State Conformational/Electronic Responses of Saddle-Shaped N , N ′-Disubstituted-Dihydrodibenzo[ a , c ]phenazines: Wide-Tuning Emission from Red to Deep Blue and White Light Combination

2015 · Zhiyun Zhang, Yu-Sin Wu, et al. · Journal of the American Chemical Society · 374

High-Refractive-Index Thin Films Prepared from Trialkoxysilane-Capped Poly(methyl methacrylate)−Titania Materials

2001 · Long-Hua Lee, Wen-Chang Chen · Chemistry of Materials · 370

Synthesis of a Giant 222 Carbon Graphite Sheet

2002 · Christopher D. Simpson, J. Diedrich Brand, et al. · Chemistry - A European Journal · 369

Multilevel interconnections for ULSI and GSI era

1997 · Shyam P. Murarka · Materials Science and Engineering R Reports · 349

Steps To Demarcate the Effects of Chromophore Aggregation and Planarization in Poly(phenyleneethynylene)s. 1. Rotationally Interrupted Conjugation in the Excited States of 1,4-Bis(phenylethynyl)benzene

2001 · Marcia Levitus, Kelli Schmieder, et al. · Journal of the American Chemical Society · 346

Planarized Triarylboranes: Stabilization by Structural Constraint and Their Plane-to-Bowl Conversion

2012 · Zhiguo Zhou, Atsushi Wakamiya, et al. · Journal of the American Chemical Society · 342

n-Type organic semiconducting polymers: stability limitations, design considerations and applications

2021 · Sophie Griggs, Adam Marks, et al. · Journal of Materials Chemistry C · 335

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Combining Electron-Neutral Building Blocks with Intramolecular “Conformational Locks” Affords Stable, High-Mobility P- and N-Channel Polymer Semiconductors

2012 · Hui Huang, Zhihua Chen, et al. · Journal of the American Chemical Society · 286

Barrier Design to Prevent Metal-Induced Degradation and Improve Thermal Stability in Perovskite Solar Cells

2018 · Caleb C. Boyd, Rongrong Cheacharoen, et al. · ACS Energy Letters · 276

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IC-Compatible Polysilicon Surface Micromachining

2000 · J. J. Sniegowski, M. P. de Boer · Annual Review of Materials Science · 257

One-Dimensional Aggregation of Regioregular Polyalkylthiophenes

2003 · Nataliya Kiriy, Evelin Jähne, et al. · Nano Letters · 253

Carrier mobilities and process stability of strained Si n- and p-MOSFETs on SiGe virtual substrates

2001 · M. T. Currie, C. W. Leitz, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 248

Chemical mechanical polishing: Theory and experiment

2013 · Dewen Zhao, Xinchun Lu · Friction · 239

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3-D Memristor Crossbars for Analog and Neuromorphic Computing Applications

2016 · Gina C. Adam, Brian D. Hoskins, et al. · IEEE Transactions on Electron Devices · 234

Opal Circuits of Light??-??Planarized Microphotonic Crystal Chips

2002 · S.M. Yang, H. Míguez, et al. · Advanced Functional Materials · 234

Application of Chemical Mechanical Polishing to the Fabrication of VLSI Circuit Interconnections

1991 · William J. Patrick, William L. Guthrie, et al. · Journal of The Electrochemical Society · 233

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Copper interconnection integration and reliability

1995 · C.-K. Hu, B. Luther, et al. · Thin Solid Films · 224

A review of techniques for polishing and planarizing chemically vapor-deposited (CVD) diamond films and substrates

1999 · A.P Malshe, B.S Park, et al. · Diamond and Related Materials · 218

Understanding of the Buckling Distortions in Silicene

2012 · Deepthi Jose, Ayan Datta · The Journal of Physical Chemistry C · 213

Sol‐Gel Inks for Direct‐Write Assembly of Functional Oxides

2007 · E. B. Duoss, M. Twardowski, et al. · Advanced Materials · 211

Fluorescent Flippers for Mechanosensitive Membrane Probes

2015 · Marta Dal Molin, Quentin Verolet, et al. · Journal of the American Chemical Society · 207

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Planarized Star‐Shaped Oligothiophenes as a New Class of Organic Semiconductors for Heterojunction Solar Cells

2003 · R. de Bettignies, Y. Nicolas, et al. · Advanced Materials · 205

Works count: 3,725

Citation count: 46,010