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Keyword

sputtering system

Description: A sputtering system is equipment that uses energetic particles to eject material from a target for thin-film deposition or surface modification.
OpenAlex ID: keywords/sputtering-system
Recent advances in magnetron sputtering technology
1998 · J. Musil · Surface and Coatings Technology · 80
A low temperature, ultrahigh vacuum, microwave-frequency-compatible scanning tunneling microscope
1994 · S. J. Stranick, M. M. Kamna, et al. · Review of Scientific Instruments · 41
Off-line ion source terminal for ISAC at TRIUMF
2008 · K. Jayamanna, F. Ames, et al. · Review of Scientific Instruments · 26
A miniature x-ray compatible sputtering system for studying i n s i t u high T c thin film growth
1991 · J. Q. Zheng, M. C. Shih, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 20
A 3-chamber deposition system for the simultaneous double-sided coating of 5-inch wafers
2001 · J. Geerk, A. Zaitsev, et al. · IEEE Transactions on Applied Superconductivity · 14
Sputtering Systems
2012 · Kiyotaka Wasa · Elsevier eBooks · 13
Magnetron sputtering systems
1998 · Metal Finishing · 13
Developments and trends in sputtering deposition techniques
1976 · J.J. Bessot · Thin Solid Films · 9
Facing targets sputtering system for depositing Co–Cr perpendicular magnetic recording media
1987 · Yoshiro Niimura, Masahiko Naoe · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 8
Reduction of pumping time for a sputtering system by glow discharge cleaning
1991 · Akiko Kagatsume, Sinjiroo Ueda, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 7
Highly Manufacturable Nanoporous Ag Films Using New Sputtering System for Surface Enhanced Raman Scattering Substrate
2019 · Sungho Yun, Dongin Lee, et al. · Journal of Nanoscience and Nanotechnology · 6
Sputtering system for multicharacteristic solar window films
1983 · Ben B. Meckel · Thin Solid Films · 5
Multichamber sputtering system for car lighting manufacture
1999 · H. Grünwald, W. Dicken, et al. · Metal Finishing · 4
Employment of Magnetron to Enhance Langmuir Probe Characteristics of Argon Glow Discharge Plasma in Sputtering System
2016 · Oday A. Hammadi, Waleed N. Raja, et al. · Iraqi Journal of Applied Physics · 3
Present Status and Tasks of Large Substrate Size Sputtering System for Flat Panel Display Manufacturing
2007 · Yoshio SUNAGA · Shinku · 3
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Sputtering system
1999 · Metal Finishing · 3
Real-time temperature monitoring using a noncontact thermocouple for the next-generation sputtering system
1996 · Akihiro Hosokawa, Masahiko Kowaka · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 3
Factors affecting cryopump base pressure
1990 · Johan E. de Rijke · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 3
Study on Film Thickness Uniformity of Magnetron Sputtering System Based on Twin Target
2021 · 魏博洋 Wei Boyang, 刘冬梅 Liu Dongmei, et al. · Acta Optica Sinica · 2
Electrical Discharge Characterization of Planar Sputtering System for Gold Target
2019 · Mohammed Khammass Khalaf, Mohammed Jwair Dathan, et al. · Diyala Journal for Pure Science · 2
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Sputtering System for the Preparation of Compositionally Modulated Films
1987 · Yuji Togami, Tadataka Morishita, et al. · Japanese Journal of Applied Physics · 2
Electrical properties of RF sputtering systems
1979 · Microelectronics Reliability · 2
Abstract: Sampling of gases in sputtering systems
1977 · James D. Burden, Bruce A. Raby · Journal of Vacuum Science and Technology · 2
In-line production of magneto-optical quadrilayers
1990 · E. Hellstern, Suk-Youn Suh, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1
A design analysis of intelligent, articulated vacuum processing systems
1985 · N. J. Bonge · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1
Works count: 140
Citation count: 277
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