Keyword

sputtering yield

Description: Sputtering yield is the average number of target atoms ejected per incident energetic particle during bombardment of a material surface.

Primary topic: Ion-surface interactions and analysis (63%)

OpenAlex ID: keywords/sputtering-yield

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

1969 · Peter Sigmund · Physical Review · 3,598

スパッタの理論 I 非晶質のスパッタ収量と多結晶ターゲット

1969 · Peter Sigmund · 1,964

Sputtering by Particle Bombardment I

1981 · Andersen, Hans Henrik, Bay, H L, et al. · Topics in applied physics · 1,241

II. The energy spectrum of ejected atoms during the high energy sputtering of gold

1968 · M. W. Thompson · Philosophical magazine · 1,198

Sputtering studies with the Monte Carlo Program TRIM.SP

1984 · J. P. Biersack, W. Eckstein · Applied Physics A · 924

Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 ev

1961 · Nils Laegreid, G. K. Wehner · Journal of Applied Physics · 818

Energy dependence of the ion-induced sputtering yields of monatomic solids

1984 · Noriaki Matsunami, Yasunori Yamamura, et al. · Atomic Data and Nuclear Data Tables · 805

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

1969 · Peter Sigmund · Physical Review · 791

Sputtering by Particle Bombardment

2007 · Rainer Behrisch, Wolfgang Eckstein · Springer eBooks · 786

Energy Dependence of Ion-induced Sputtering Yields From Monatomic Solids at Normal Incidence

1996 · YASUNORI YAMAMURA, HIRO TAWARA · Atomic Data and Nuclear Data Tables · 772

Tridyn — A TRIM simulation code including dynamic composition changes

1984 · W. Möller, W. Eckstein · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 652

Sputtering by Particle Bombardment II

1983 · Betz, G, Carter, George, et al. · Topics in applied physics · 651

Subplantation model for film growth from hyperthermal species

1990 · Y. Lifshitz, S. R. Kasi, et al. · Physical review. B, Condensed matter · 594

A mechanism of surface micro-roughening by ion bombardment

1973 · Peter Sigmund · Journal of Materials Science · 567

Sputtering Yields for Low Energy He+-, Kr+-, and Xe+-Ion Bombardment

1962 · D. Rosenberg, G. K. Wehner · Journal of Applied Physics · 429

Tutorial: Reactive high power impulse magnetron sputtering (R-HiPIMS)

2017 · André Anders · Journal of Applied Physics · 424

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The physics of grain-grain collisions and gas-grain sputtering in interstellar shocks

1994 · A. G. G. M. Tielens, C. F. McKee, et al. · The Astrophysical Journal · 367

Main Physical Features and Processes Determining the Performance of Stationary Plasma Thrusters

1998 · Vladimir Kim · Journal of Propulsion and Power · 330

Sputtering from elastic-collision spikes in heavy-ion-bombarded metals

1981 · P. Sigmund, C. Claussen · Journal of Applied Physics · 321

Sputtering of chemisorbed gas (nitrogen on tungsten) by low-energy ions

1974 · Harold F. Winters, Peter Sigmund · Journal of Applied Physics · 318

A universal relation for the sputtering yield of monatomic solids at normal ion incidence

1984 · J. Bohdansky · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 314

Sputtering Yields at Very Low Bombarding Ion Energies

1962 · R. V. Stuart, G. K. Wehner · Journal of Applied Physics · 307

Sputtering—a review of some recent experimental and theoretical aspects

1975 · H. Oechsner · Applied Physics A · 299

Sputtering yield measurements

1981 · Hans Henrik Andersen, Helge L. Bay · Topics in applied physics · 286

On the problem of whether mass or chemical bonding is more important to bombardment-induced compositional changes in alloys and oxides

1980 · Roger Kelly · Surface Science · 285

Works count: 4,595

Citation count: 88,740