Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
Source
ISSNs 1071-1023, 1520-8567
Source type: journal
Publisher: American Institute of Physics
Alternate names JVST B, Journal of vacuum science and technology., Journal of vacuum science & technology., Microelectronics and nanometer structures, $I Issues for 2003- have issue PDF table of contents title: $a Journal of vacuum science & technology.
Fully open access: No
In DOAJ: No
2yr mean citedness:
H-index: 139
I10-index: 6,089
Works count: 2,203
Citations count: 36,380
GaN, AlN, and InN: A review
1992 · S. Strite, H. Morkoç · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
Band offsets of wide-band-gap oxides and implications for future electronic devices
2000 · John Robertson · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
Nanoimprint lithography
1996 · Stephen Y. Chou, Peter R. Krauss, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena