Proceedings, IEEE micro electro mechanical systems
Source
ISSN 1084-6999
Source type: journal
Alternate name Micro electro mechanical systems
Fully open access: No
In DOAJ: No
2yr mean citedness:
H-index: 44
I10-index: 207
Works count: 251
Citations count: 2,358
A micromachined comb-drive tuning fork rate gyroscope
2002 · Jonathan Bernstein, S. Cho, et al. · Proceedings, IEEE micro electro mechanical systems
Microelectromechanical filters for signal processing
1992 · Liwei Lin, Clark T.‐C. Nguyen, et al. · Proceedings, IEEE micro electro mechanical systems
Real three dimensional micro fabrication using stereo lithography and metal molding
2002 · K. Ikuta, K. Hirowatari · Proceedings, IEEE micro electro mechanical systems