Plasma Diagnostics and Applications
Topics
Description: This cluster of papers covers a wide range of topics related to plasma physics and its applications in the semiconductor industry, including plasma etching techniques, atomic layer etching, Hall thrus... more
Related topics (siblings) 3D IC and TSV technologies, Advanced Battery Materials and Technologies, Advanced battery technologies research, Advanced Data and IoT Technologies, Advanced DC-DC Converters +111 more
Subfield (parent): Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Works count: 99,150
Citations count: 833,100