Year: 1990
Type: conference-paper
Abstract: Synchrotron radiation from dipole magnets in electron storage rings has emerged as a useful source of x-rays for lithography. The goal of the SXLS Project at BNL is to design and construct a compact storage ring of circumference, C = 8.503 meters. It will use superconducting dipoles with a field of B{sub 0} = 3.87 Tesla and bending radius of {rho} = .6037 meters along with 700 MeV electrons to produce 10 angstrom x-rays for lithography. The project is proceeding in two phases: in Phase I low field iron dipoles are being used; in Phase II the low field dipoles will be replaced with superconducting dipoles. An overview of the design and status report are presented.
Authors: Murphy, J.B., Blumberg, L.N., Bozoki, E., Desmond, E., Galayda, J., Halama, H., Heese, R., Hsieh, H., Keane, J., Kramer, S., Mortazavi, P., Schuchman, J., Sharma, S., Singh, O., Solomon, L., Thomas, M., Wang, J.M. (Brookhaven National Lab., Upton, NY (USA)), Kalsi, S., Reusch, M., Rose, J. (Grumman Aerospace Corp., Bethpage, NY (USA)), Moser, H.O. (Kernforschungszentrum Karlsruhe GmbH (Germany, F.R.))
Institution: Brookhaven National Laboratory
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W101991109