Work

Energy Dependence and Annealing Behaviour of Boron Range Distributions in Silicon

Year: 1973

Type: book-chapter

Source: Springer eBooks

DOI: 10.1007/978-1-4684-2064-7_12

Authors: K. Wittmaack, J. Maul, F. Schulz

Institution: Helmholtz Munich

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W122199711

FWCI: 2.424

Cites: 16

Cited by: 9

Related to: 10