Year: 2012
Type: conference-paper
Abstract: The conductometric gas sensors made of nanoporous oxide ultrathin membranes can be particularly promising for the active sampling of the diluted analytes.Here we report the case study of the electron transport and gas sensing properties of such a membrane made of Ta 2 O 5 .In spite of well-known high thermal and chemical stability, Ta 2 O 5 membranes appear to exhibit noticeable chemical sensitivity at high temperatures above 300 C. The proposed suspended architecture of the gas penetrable Ta 2 O 5 membranes as active sensing element, may lead to the new designs of the ultrasensitive analytical systems operating at high temperature and harsh environments.
Source: Proceedings IMCS 2012
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W128296552