Work

Use of anodic tantalum pentoxide for high-density capacitor fabrication

Year: 1999

Type: article

Source: Journal of Materials Science Materials in Electronics

DOI: 10.1023/a:1008901624514

Authors: S. Duen~as, E. Casta´n, J. Barbolla, R. R. Kola, P. A. Sullivan

Institutions: Universidad de Valladolid, Alcatel-Lucent (France)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W137122013

FWCI: 1.775

Cites: 13

Cited by: 24

Related to: 10