Work

Alignment Metrology and Techniques

Year: 2002

Type: book-chapter

Source: Elsevier eBooks

DOI: 10.1016/b978-012207891-0/50020-x

Authors: Darrin P. Clement, Ronald C. Lasky, Daniel Baldwin

Institution: Georgia Institute of Technology

Language: English

Topic: Semiconductor Lasers and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W137922896

FWCI: 1.144

Cites: 36

Cited by: 3

Related to: 10