Work

Activation of Mg after Implantation in si-InP by means of EB-RTA

Year: 1996

Type: book-chapter

Source: Elsevier eBooks

DOI: 10.1016/b978-0-444-82334-2.50177-5

Authors: C. Maurer, R. Kallweit, K. Bethge

Institutions: Goethe University Frankfurt, Deutsche Telekom (Germany)

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W14426518

FWCI:

Cites: 5

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Related to: 10