Work

The electronic structure at the atomic scale of ultrathin gate oxides

Year: 1999

Type: article

Source: Nature

DOI: 10.1038/21602

Authors: D. A. Muller, T. Sorsch, S. Moccio, F. H. Baumann, K. Evans-Lutterodt, G. Timp

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1487069997

FWCI: 82.09

Cites: 22

Cited by: 986

Related to: 10