Work

Formation and reduction of streak artefacts in electron tomography

Year: 2009
Type: article
Abstract: We have analysed the formation of streak artefacts in the reconstruction based on the filtered back projection algorithm in electron tomography (ET) and accordingly applied an adaptive interpolation technique to artefact reduction. In the adaptive interpolation to recover the missing information, the edge positions in a projection curve were tracked to reduce the interpolation error. A simulation was used to demonstrate the effectiveness of the artefact reduction. Furthermore, image reconstruction of integrated circuit specimens in the ET experiments with the ultra-high voltage electron microscope show that the strong streak artefacts can be reduced effectively by our artefact reduction technique.
Language: English
Open Access status: green
OpenAlex ID: W1495597496
FWCI: 0.156
Cites: 24
Cited by: 12
Related to: 10