Work

Cylindrical Full Metal Capacitor Technology For High-speed Gigabit DRAMs

Year: 1997

Type: conference-paper

Source: Symposium on VLSI Technology

DOI: 10.1109/vlsit.1997.623743

Authors: Drynan, Nakajima, Akimoto, Saito, Suzuki, Kamiyarna, Takaishi

Institution: NEC (Japan)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W1496828451

FWCI: 6.409

Cites: 2

Cited by: 8

Related to: 10