Work

Theory and Practicalities of Subwavelength Optical Lithography

Year: 2004

Type: book-chapter

Source: Wiley eBooks

DOI: 10.1002/0471653829.ch3

Authors: Ban P. Wong, Anurag Mittal, Yu Cao, Greg Starr

Institutions: Nvidia (United States), University of California, Berkeley, Xilinx (United States)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1499809129

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