Work

157 nm-248 nm multiwavelength excitation processing for application in optoelectronic manufacturing

Year: 2002

Type: conference-paper

Source: Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)

DOI: 10.1109/cleopr.2001.967844

Authors: K. Obata, K. Sugioka, T. Akane, N. Aoki, K. Toyoda, K. Midorikawa

Institutions: Tokyo University of Science, RIKEN

Language: English

Topic: Laser Material Processing Techniques

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1536629205

FWCI:

Cites: 1

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Related to: 10