Work

Optima MD: Mid-Dose, Hybrid-Scan Ion Implanter

Year: 2006

Type: conference-paper

Source: AIP conference proceedings

DOI: 10.1063/1.2401598

Authors: K. W. Wenzel, A. M. Ray, B. H. Vanderberg, R. D. Rathmell

Institution: Axcelis Technologies (United States)

Language: Lithuanian

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1537869321

FWCI: 2.563

Cites: 2

Cited by: 1

Related to: 10