Work

Effects of geometric parameters and limits of application of microelectronic capacitive pressure sensors

Year: 2015

Type: conference-paper

Source: International Conference on Control, Engineering & Information Technology

DOI: 10.1109/ceit.2015.7233134

Authors: S. Bouguima, N. Benmoussa

Institution: University of Abou Bekr Belkaïd

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1542321935

FWCI:

Cites: 9

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Related to: 10