Work

NSPUDT using c-axis tilted ScAlN thin film

Year: 2015

Type: conference-paper

Source: Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)

DOI: 10.1109/fcs.2015.7138925

Authors: Abhay Kochhar, Yasuo Yamamoto, Akihiko Teshigahara, Ken-ya Hashimoto, Shuji Tanaka, Masayoshi Esashi

Institutions: Tohoku University, Advanced Institute for Materials Research, Tohoku University, Denso (Japan), Chiba University

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1548601465

FWCI: 0.832

Cites: 13

Cited by: 3

Related to: 10