Year: 2015
Type: article
Abstract: An extension of Fourier scatterometry is presented, aiming at increasing the sensitivity by measuring the phase difference between the reflections polarized parallel and perpendicular to the plane of incidence. The ellipsometric approach requires no additional hardware elements compared with conventional Fourier scatterometry. Furthermore, incoherent illumination is also sufficient, which enables spectroscopy using standard low-cost light sources.
Authors: P. Petrik, N. Kumar, M. Fried, B. Fodor, G. Juhasz, S. F. Pereira, S. Burger, H. P. Urbach
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $1,921
Award: G8056495156
OpenAlex ID: W1554635651