The formation of a fine-patterned ferroelectric thin film from a sol-gel solution containing a photo-sensitive water-generator
Year: 2002
Type: conference-paper
Authors: N. Soyama, G. Sasaki, T. Atsuki, T. Yonezawa, K. Ogi
Institution: Mitsubishi Materials (Japan)
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1576981393
