Tetrachlorosilane Consumption in Radio Frequency Glow Discharge
Year: 1998
Type: article
Authors: L. M. Blinov, A. G. Golovkin, L. I. Kaganov, V. B. Oparin, A. A. Razhavski, A. M. Shterenberg, V. V. Volodko, V. I. Zyn
Institution: Samara State Technical University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W157803307