Work

Motion Control of a Wafer Stage : A Design Approach for Speeding Up IC Production

Year: 1997

Type: dissertation

Source: Research Repository (Delft University of Technology)

Author: D. de Roover

Language: English

Topic: Piezoelectric Actuators and Control

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: green

OpenAlex ID: W1580181034

Cites:

Cited by: 41

Related to: 10