Work

A miniature Fabry-Perot interferometer fabricated using silicon micromachining techniques

Year: 2003

Type: conference-paper

Source: Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop)

DOI: 10.1109/solsen.1988.26422

Authors: J.H. Jerman, S.R. Mallinson

Institutions: BT Group (United Kingdom), BT Research

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1599295366

FWCI: 0.897

Cites: 3

Cited by: 13

Related to: 10