Overview and analysis of readout circuits for capacitive sensing in MEMS gyroscopes (MEMS angular velocity sensors)
Year: 2009
Type: conference-paper
Authors: Mykhaylo Lobur, Andriy Holovatyy
Institution: Lviv Polytechnic National University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1636025580