A Data-Driven Variable-Gain Control Strategy for an Ultra-Precision Wafer Stage With Accelerated Iterative Parameter Tuning
Year: 2015
Type: article
Authors: Min Li, Yu Zhu, Kaiming Yang, Chuxiong Hu
Institutions: State Key Laboratory of Tribology, Tsinghua University
Language: English
Subfield: Control and Systems Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: 全局任务坐标系下的平面电机快速大曲率轮廓运动控制研究
OpenAlex ID: W1662965174