Work

Transient Response of Radio Frequency Inductively Coupled Plasma for Pulse Modulation

Year: 2001

Type: article

Source: Plasma Chemistry and Plasma Processing

DOI: 10.1023/a:1011074410005

Authors: K. C. Paul, J. Mostaghimi, T. Ishigaki, T. Sakuta

Institutions: University of Toronto, National Institute for Materials Science, Kanazawa University

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1800876232

FWCI: 1.673

Cites: 31

Cited by: 8

Related to: 10