Work

A new tool for nondestructive monitoring of ion implantation

Year: 2002

Type: conference-paper

Source: International Conference on Ion Implantation Technology

DOI: 10.1109/iit.2000.924238

Authors: P.G. Coleman, C.P. Burrows, A.P. Knights, R.M. Gwilliam, B.J. Sealy, R.D. Goldberg, A. Al-Bayati, M. Foad, A. Murrell

Institutions: University of Bath, University of Surrey, Applied Materials (United Kingdom)

Language: English

Topic: Muon and positron interactions and applications

Subfield: Condensed Matter Physics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

Funders: University of Bath, University of Surrey, Engineering and Physical Sciences Research Council

OpenAlex ID: W1877804367

FWCI: 1.221

Cites: 8

Cited by: 2

Related to: 10