Work

New method of extraction of systematic failure component

Year: 2002

Type: conference-paper

Source: IEEE International Symposium on Semiconductor Manufacturing conference proceedings

DOI: 10.1109/issm.2001.962959

Authors: K. Mitsutake, Y. Ushiku, Y. Arakawa, T. Ishibumi, O. Ito

Institution: Toshiba (Japan)

Language: English

Topic: Fault Detection and Control Systems

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1878477884

FWCI: 0.814

Cites: 3

Cited by: 2

Related to: 10