Work

Optimization of Surface Acoustic Wave-Based Rate Sensors

Year: 2015

Type: article

Abstract: The optimization of an surface acoustic wave (SAW)-based rate sensor incorporating metallic dot arrays was performed by using the approach of partial-wave analysis in layered media. The optimal sensor chip designs, including the material choice of piezoelectric crystals and metallic dots, dot thickness, and sensor operation frequency were determined theoretically. The theoretical predictions were confirmed experimentally by using the developed SAW sensor composed of differential delay line-oscillators and a metallic dot array deposited along the acoustic wave propagation path of the SAW delay lines. A significant improvement in sensor sensitivity was achieved in the case of 128° YX LiNbO₃, and a thicker Au dot array, and low operation frequency were used to structure the sensor.

Source: Sensors

DOI: 10.3390/s151025761

Authors: Fangqian Xu, Wen Wang, Xiuting Shao, Xinlu Liu, Yong Liang

Institutions: Communication University of Zhejiang, Chinese Academy of Sciences, Institute of Acoustics, State Key Laboratory of Acoustics

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $3,137

Funders: National Natural Science Foundation of China, Chinese Academy of Sciences