Work

Degradation of the surface passivation of plasma-assisted ALD Al2O3under damp-heat exposure

Year: 2014

Type: article

Source: physica status solidi (a)

DOI: 10.1002/pssa.201431256

Authors: Wensheng Liang, Dongchul Suh, Jun Yu, James Bullock, Klaus J. Weber

Institutions: Australian National University, Seoul National University

Language: English

Topic: Silicon and Solar Cell Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Australian National Fabrication Facility, Australian Government, Australian Renewable Energy Agency

OpenAlex ID: W1919686912

FWCI: 1.208

Cites: 41

Cited by: 18

Related to: 10