Work

A large-Travel vertical planar actuator with improved stability

Year: 2004

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/sensor.2003.1215326

Authors: E.R. Deutsch, J.P. Bardhan, S.D. Senturia, G.B. Hocker, D.W. Youngner, M.B. Sinclair, M.A. Butler

Institutions: Massachusetts Institute of Technology, Honeywell (United States), Sandia National Laboratories

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Dementia Australia Research Foundation

OpenAlex ID: W1948612929

FWCI: 2.491

Cites: 4

Cited by: 12

Related to: 10