A practitioner's approach to evaluation strategy for ellipsometric measurements of multilayered and multiparametric thin-film structures
Year: 2015
Type: article
Source: Thin Solid Films
Author: D.V. Likhachev
Institution: GlobalFoundries (Germany)
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1961381908