Work

Microlens array fabrication by backside exposure using Fraunhofer diffraction

Year: 2008

Type: article

Source: Microsystem Technologies

DOI: 10.1007/s00542-007-0510-2

Authors: In-Hyouk Song, Kyung-Nam Kang, Yoonyoung Jin, Daniel S.-W. Park, Pratul K. Ajmera

Institutions: Polytechnique Montréal, Louisiana State University

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1963663690

FWCI: 1.197

Cites: 7

Cited by: 12

Related to: 10