Effect of lens aberration on oblique-illumination stepper system
Year: 1993
Type: conference-paper
DOI: 10.1117/12.150422
Authors: Pei-yang Yan, Qi-De Qian, Joseph C. Langston
Institution: Intel (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1963998787