Work

Atomic oxygen in remote plasma of radio-frequency hollow cathode discharge source: Characterization and efficiency

Year: 2010

Type: article

Source: Vacuum

DOI: 10.1016/j.vacuum.2010.08.004

Authors: M. Naddaf, S. Saloum, B. Alkhaled

Institution: Atomic Energy Commission of Syria

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1964147674

FWCI: 1.43

Cites: 37

Cited by: 10

Related to: 10