Evaluation of methods to improve EUV OPC model accuracy
Year: 2013
Type: conference-paper
DOI: 10.1117/12.2009281
Authors: Tamer H. Coskun, Chris Clifford, Germain Fenger, Gek Soon Chua, Keith Standiford, Ralph Schlief, Craig Higgins, Yi Zou
Institutions: GlobalFoundries (United States), GlobalFoundries (Singapore)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1964150419