Work

All‐Oxide Crystalline Microelectromechanical Systems: Bending the Functionalities of Transition‐Metal Oxide Thin Films

Year: 2009

Type: article

Source: Advanced Materials

DOI: 10.1002/adma.200803360

Authors: Luca Pellegrino, Michele Biasotti, Emilio Bellingeri, Cristina Bernini, Antonio Sergio Siri, Daniele Marré

Institutions: Istituto Nazionale di Fisica Nucleare, Sezione di Genova, University of Genoa

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Centre National de la Recherche Scientifique

OpenAlex ID: W1964511268

FWCI: 3.351

Cites: 38

Cited by: 47

Related to: 10