Work

Study of silicon-on-insulator substrates incorporated with buried MoSi2 layer

Year: 2008

Type: article

Source: Thin Solid Films

DOI: 10.1016/j.tsf.2008.10.043

Authors: Chao Chen, Weili Liu, Xiaobo Ma, Qinwo Shen, Zhitang Song, Chenglu Lin

Institutions: Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1965675772

FWCI:

Cites: 10

Cited by: 4

Related to: 10