Modular Electron Beam Source for Thin Film Deposition
Year: 1966
Type: article
Source: Review of Scientific Instruments
DOI: 10.1063/1.1720010
Authors: K. L. Chopra, M. R. Randlett
Language: English
Subfield: Nuclear and High Energy Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1966200012
