Work

Optical emission spectra of OMCTS/O2 fed plasmas used for thin film deposition

Year: 2010

Type: article

Source: Surface and Coatings Technology

DOI: 10.1016/j.surfcoat.2010.08.004

Authors: A. Matilainen, N. Britun, J. Su Bong, J.G. Han

Institution: Sungkyunkwan University

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1966279697

FWCI: 0.49

Cites: 17

Cited by: 3

Related to: 10