Work

Patterning of thick polymeric substrates for the fabrication of microfluidic devices

Year: 2005

Type: conference-paper

Abstract: Plasma etching is investigated as an alternative technology to soft lithography for the fabrication of microfluidic devices. First, soft lithography was employed for the fabrication of microchannels in poly-dimethylsiloxane (PDMS), for use in a biosensor for protein and DNA detection. Then, a plasma etching process was investigated and optimized with respect to etch rate maximization for PDMS and PMMA substrates. Preliminary results for deep pattern transfer to these polymeric substrates with an Al etch mask are shown.

Source: Journal of Physics Conference Series

DOI: 10.1088/1742-6596/10/1/072

Authors: M E Vlachopoulou, A Tserepi, N Vourdas, E Gogolides, K Misiakos

Institution: National Centre of Scientific Research "Demokritos"

Language: English

Topic: Microfluidic and Capillary Electrophoresis Applications

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: diamond

OpenAlex ID: W1966396374

FWCI: 4.19

Cites: 8

Cited by: 24

Related to: 10