Work

Ion beam deposition in materials research

Year: 1989

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/0168-583x(89)90129-8

Authors: R.A. Zuhr, S.J. Pennycook, T.S. Noggle, N. Herbots, T.E. Haynes, B.R. Appleton

Institution: Oak Ridge National Laboratory

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1967009281

FWCI: 4.249

Cites: 31

Cited by: 30

Related to: 10