Work

Influence of an External Magnetic Field on the Growth of Nanocrystalline Silicon Films Grown by MF Magnetron Sputtering

Year: 2012

Type: article

Source: Journal of Material Science and Technology

DOI: 10.1016/s1005-0302(12)60163-7

Authors: Junhua Gao, Lin Zhang, Jinquan Xiao, Jun Gong, Chao Sun, Lishi Wen

Institutions: Chinese Academy of Sciences, Institute of Metal Research

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1967049532

FWCI: 0.195

Cites: 28

Cited by: 5

Related to: 10