Work

Surface Defects in Polished Silicon Studied by Cross‐Sectional Transmission Electron Microscopy

Year: 1989

Type: article

Source: Journal of the American Ceramic Society

DOI: 10.1111/j.1151-2916.1989.tb09696.x

Authors: Stefan Johansson, Jan‐Åke Schweitz, K. Peter, O. Lagerlöf

Institutions: Uppsala University, Case Western Reserve University

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1967185482

FWCI: 2.442

Cites: 16

Cited by: 34

Related to: 10