Work

Structural, electrical, and mechanical properties of nc-TiC∕a-SiC nanocomposite thin films

Year: 2005

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.2131081

Authors: P. Eklund, J. Emmerlich, H. Högberg, O. Wilhelmsson, P. Isberg, J. Birch, P. O. Å. Persson, U. Jansson, L. Hultman

Institutions: Linköping University, Uppsala University, ABB (Sweden)

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Battelle

OpenAlex ID: W1967686140

FWCI: 6.952

Cites: 29

Cited by: 71

Related to: 10