Year: 2011
Type: article
Abstract: This paper describes the design and characterization of a silicon‐based sensor chip for monitoring of fermentation processes. The sensor chip consists of three sensors using different transducer principles. A capacitive electrolyte‐insulator‐semiconductor (EIS) field‐effect structure with Ta2O5 as gate material was utilized as pH sensor. An electrolyte conductivity sensor was realized by measuring the impedance between two interdigitated electrodes (IDE). A platinum thermistor was included for temperature measurements. The EIS sensor was integrated into a bioreactor and successfully used for an inline pH measurement. The layout of the IDE has been optimized with respect to a high cell constant and a wide detectable conductivity range. The integrated platinum thermistor allowed for temperature compensation of the electrolyte conductivity measurement.
Source: physica status solidi (a)
Institutions: Forschungszentrum Jülich, FH Aachen, Hasselt University
Language: English
Subfield: Analytical Chemistry
Field: Chemistry
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W1968001050